EE 535

Introduction to Micro Electro Mechanical Systems (MEMS) and to the fundamentals of micromachining and microfabrication techniques, thin-film processes, photolithography, deposition and etching techniques for MEMS fabrication. Multi-domain analysis of sensing and transduction mechanisms, capacitive and piezoresistive techniques, and design and analysis of micromachined sensors and actuators. Review of pressure sensors, accelerometers, gyroscopes and resonators and their applications.